Browsing by author "Gehoel-van Ansem, W."
Now showing items 1-2 of 2
-
Characterization and optimization of positive tone DUV resists on TiN substrates
Zandbergen, Peter; Gehoel-van Ansem, W.; Vandenberghe, Geert; Van Driessche, Veerle; Vloeberghs, H. (1997) -
Lithographic performance of 193 nm resist
Goethals, Mieke; Pollers, Ingrid; Van Roey, Frieda; Sugihara, Takashi; Ronse, Kurt; Heskamp, B.; Davies, G.; Gehoel-van Ansem, W.; Paniez, P.; Temerson, T. M.; Hien, S.; Mortini, B.; Romeo, C. (1998)