Publication:

Lithographic performance of 193 nm resist

Date

1998

Proceedings Paper

Simple item page Full metadata Statistics

Files

2675.pdf 1.71 MB

Author(s)

Goethals, Mieke

;

Pollers, Ingrid

;

Van Roey, Frieda

;

Sugihara, Takashi

;

;

;

;

Gehoel-van Ansem, W.

;

;

Temerson, T. M.

;

;

;

Metrics

1963 since deposited on 2021-09-30

Acq. date: 2026-01-06