Publication:

Lithographic performance of 193 nm resist

Date

1998
Proceedings Paper
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Author(s)

Goethals, Mieke
;
Pollers, Ingrid
;
Van Roey, Frieda  
;
Sugihara, Takashi
;
Ronse, Kurt  
;
Heskamp, B.
;
Davies, G.
;
Gehoel-van Ansem, W.
;
Paniez, P.
;
Temerson, T. M.
;
Hien, S.
;
Mortini, B.
;
Romeo, C.

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Abstract

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