Publication:

Characterization and optimization of positive tone DUV resists on TiN substrates

Date

1997

Proceedings Paper

Simple item page Full metadata Statistics

Files

2294.pdf 4.28 MB

Author(s)

Zandbergen, Peter

;

Gehoel-van Ansem, W.

;

Vandenberghe, Geert

;

Van Driessche, Veerle

;

Metrics

1880 since deposited on 2021-09-30

Acq. date: 2026-01-06