Browsing by author "Cho, Sangjoon"
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In-line 3D AFM for critical dimension and sidewall roughness of Si photonic waveguide and correlation with its propagation loss
Kim, Tae-Gon; Verheyen, Peter; De Heyn, Peter; Vandeweyer, Tom; Miller, Andy; Pantouvaki, Marianna; Van Campenhout, Joris; Jo, Ahjin; Cho, Sangjoon; Park, Sang-il (2017)