Authors

Kim, Tae-Gon; Verheyen, Peter; De Heyn, Peter; Vandeweyer, Tom; Miller, Andy; Pantouvaki, Marianna; Van Campenhout, Joris; Jo, Ahjin; Cho, Sangjoon; Park, Sang-il

Conference

International Conference on Frontiers of Characterization and Metrology for Nanoelectronics - FCMN

Title

In-line 3D AFM for critical dimension and sidewall roughness of Si photonic waveguide and correlation with its propagation loss

Publication type

Oral presentation

Embargo date

9999-12-31