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In-line 3D AFM for critical dimension and sidewall roughness of Si photonic waveguide and correlation with its propagation loss

Date

2017
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dc.contributor.authorKim, Tae-Gon
dc.contributor.authorVerheyen, Peter
dc.contributor.authorDe Heyn, Peter
dc.contributor.authorVandeweyer, Tom
dc.contributor.authorMiller, Andy
dc.contributor.authorPantouvaki, Marianna
dc.contributor.authorVan Campenhout, Joris
dc.contributor.authorJo, Ahjin
dc.contributor.authorCho, Sangjoon
dc.contributor.authorPark, Sang-il
dc.contributor.imecauthorVerheyen, Peter
dc.contributor.imecauthorDe Heyn, Peter
dc.contributor.imecauthorVandeweyer, Tom
dc.contributor.imecauthorMiller, Andy
dc.contributor.imecauthorPantouvaki, Marianna
dc.contributor.imecauthorVan Campenhout, Joris
dc.contributor.orcidimecDe Heyn, Peter::0000-0003-3523-7377
dc.contributor.orcidimecVan Campenhout, Joris::0000-0003-0778-2669
dc.date.accessioned2021-10-24T06:58:21Z
dc.date.available2021-10-24T06:58:21Z
dc.date.embargo9999-12-31
dc.date.issued2017
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/28687
dc.identifier.urlhttps://www.nist.gov/pml/engineering-physics-division/2017-fcmn-presentations
dc.source.conferenceInternational Conference on Frontiers of Characterization and Metrology for Nanoelectronics - FCMN
dc.source.conferencedate21/03/2016
dc.source.conferencelocationMonterey, CA USA
dc.title

In-line 3D AFM for critical dimension and sidewall roughness of Si photonic waveguide and correlation with its propagation loss

dc.typeOral presentation
dspace.entity.typePublication
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