Browsing by author "Amann, Christophe"
Now showing items 1-1 of 1
-
Evaluation of post ion-implantation resist strip with the background signal of a light scattering tool
Halder, Sandip; Vos, Rita; Wada, Masayuki; Tsvetanova, Diana; Claes, Martine; Mertens, Paul; Radovanovic, Sanda; Dighe, Prasanna; Amann, Christophe; Simpson, Gavin; Polli, Marco (2010)