Authors

Halder, Sandip; Vos, Rita; Wada, Masayuki; Tsvetanova, Diana; Claes, Martine; Mertens, Paul; Radovanovic, Sanda; Dighe, Prasanna; Amann, Christophe; Simpson, Gavin; Polli, Marco

ISSN

0021-4922

Issue

5

Journal

Japanese Journal of Applied Physics

Volume

49

Title

Evaluation of post ion-implantation resist strip with the background signal of a light scattering tool

Publication type

Journal article

Embargo date

9999-12-31