Browsing by author "Arai, H"
Now showing items 1-2 of 2
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Integration of porogen-based low-k films: influence of capping layer thickness and long thermal anneals on low-k damage and reliability
De Roest, David; Vereecke, Bart; Huffman, Craig; Heylen, Nancy; Croes, Kristof; Arai, H; Takamure, N; Beynet, Julien; Sprey, Hessel; Matsushita, K; Kobayashi, N; Verdonck, Patrick; Demuynck, Steven; Beyer, Gerald; Tokei, Zsolt (2009) -
Optimization of low-k UV curing: effect of wavelength on critical properties of the dielectric
Aksenov, German; De Roest, David; Verdonck, Patrick; Dultsev, F.N.; Marsik, Prema; Shamiryan, Denis; Arai, H; Takamura, N.; Baklanov, Mikhaïl (2009)