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Integration of porogen-based low-k films: influence of capping layer thickness and long thermal anneals on low-k damage and reliability
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1923 since deposited on 2021-10-17
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Acq. date: 2025-10-24
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Views
1923 since deposited on 2021-10-17
437item.page.metrics.field.last-week
Acq. date: 2025-10-24
Citations