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Integration of porogen-based low-k films: influence of capping layer thickness and long thermal anneals on low-k damage and reliability
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1929 since deposited on 2021-10-17
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Acq. date: 2026-03-16
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Statistics
Views
1929 since deposited on 2021-10-17
1last month
1last week
Acq. date: 2026-03-16
Citations