Browsing by author "Matsumoto, Hirokazu"

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Development of main chain scission type photoresists for EUV lithography

Shirotori, Akihide; Vesters, Yannick; Hoshino, Manabu; Rathore, Ashish; De Simone, Danilo; Vandenberghe, Geert; Matsumoto, Hirokazu (2019)
Improved resolution with main chain scission resists for EUV lithography

Shirotori, Akihide; Hoshino, Manabu; Rathore, Ashish; Fu, Yeh Sin; De Simone, Danilo; Vandenberghe, Geert; Matsumoto, Hirokazu (2022)