Development of main chain scission type photoresists for EUV lithography

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Authors
Shirotori, Akihide; Vesters, Yannick; Hoshino, Manabu; Rathore, Ashish; De Simone, Danilo; Vandenberghe, Geert; Matsumoto, Hirokazu
Conference
International Conference on Extreme Ultraviolet Lithography 2019
Title
Development of main chain scission type photoresists for EUV lithography
Publication type
Proceedings paper
Embargo date
9999-12-31
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