Browsing by author "An, Junyang"

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Impact of PECVD-prepared interfacial Si and SiGe layers on epitaxial Si films grown by PECVD (200 degrees C) and APCVD (1130 degrees C)

An, Junyang; Maurice, Jean-Luc; Roca i Cabarrocas, Pere; Chen, Wanghua; Depauw, Valerie (2021)