Browsing by author "Fung Chen, J."
Now showing items 1-3 of 3
-
Double dipole lithography for 65-nm node and beyond: a technology readiness review
Hsu, Stephen; Eurlings, Mark; Hendrickx, Eric; Van Den Broeke, Douglas J.; Chiou, Tsann-Bim; Fung Chen, J.; Laidig, Thomas L.; Shi, Xuelong; Finders, Jo (2004-08) -
Through pitch low-k1 contact hole imaging with CPL(TM) technology
Wiaux, Vincent; Bekaert, Joost; Ronse, Kurt; Vandenberghe, Geert; Fung Chen, J.; Hsu, Stephen; Van Den Broeke, Douglas; Socha, Robert (2004) -
Through pitch low-k1 contact hole imaging with CPLTM technology
Wiaux, Vincent; Bekaert, Joost; Fung Chen, J.; Hsu, Stephen; Ronse, Kurt; Socha, Robert; Vandenberghe, Geert; Van Den Broeke, Douglas (2004)