Browsing by author "Anjos, Daniela M."

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Advanced metallization scheme for 3×50μm via middle TSV and beyond

Van Huylenbroeck, Stefaan; Li, Yunlong; Heylen, Nancy; Croes, Kristof; Beyer, Gerald; Beyne, Eric; Brouri, Mohand; Gopinath, Sanjay; Nalla, Praveen; Thorum, Matthew; Meshram, Prashant; Anjos, Daniela M.; Yu, Jengyi (2015)
Reliability study of liner/barrier/seed options for via-middle TSV's with 3m diameter and below

Li, Yunlong; Van Huylenbroeck, Stefaan; Roussel, Philippe; Brouri, Mohand; Gopinath, Sanjay; Anjos, Daniela M.; Thorum, Matthew; Yu, Jengyi; Beyer, Gerald; Beyne, Eric; Croes, Kristof (2015)