Publication:

Reliability study of liner/barrier/seed options for via-middle TSV's with 3m diameter and below

Date

2015

Proceedings Paper

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Author(s)

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Van Huylenbroeck, Stefaan

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Roussel, Philippe

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Gopinath, Sanjay

;

Anjos, Daniela M.

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Thorum, Matthew

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Statistics

1930 since deposited on 2021-10-22

Acq. date: 2026-02-25