Reliability study of liner/barrier/seed options for via-middle TSV's with 3m diameter and below

Publication:

2015

Proceedings Paper

Author(s)

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;

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Brouri, Mohand

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Gopinath, Sanjay

;

Anjos, Daniela M.

;

Thorum, Matthew

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Yu, Jengyi

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;

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1931 since deposited on 2021-10-22

1last month

Acq. date: 2026-03-16