Publication:

Advanced metallization scheme for 3×50μm via middle TSV and beyond

Date

2015
Proceedings Paper
Simple item page Full metadata Statistics
Loading...
Thumbnail Image

Files

30609.pdf 1.28 MB

Author(s)

Van Huylenbroeck, Stefaan  
;
Li, Yunlong  
;
Heylen, Nancy  
;
Croes, Kristof  
;
Beyer, Gerald  
;
Beyne, Eric  
;
Brouri, Mohand
;
Gopinath, Sanjay
;
Nalla, Praveen
;
Thorum, Matthew
;
Meshram, Prashant
;
Anjos, Daniela M.
;
Yu, Jengyi

Journal

Abstract

Description

Metrics

Downloads

1 since deposited on 2021-10-23
Acq. date: 2026-01-11

Views

2009 since deposited on 2021-10-23
2last month
Acq. date: 2026-01-11

Citations

Metrics

Downloads

1 since deposited on 2021-10-23
Acq. date: 2026-01-11

Views

2009 since deposited on 2021-10-23
2last month
Acq. date: 2026-01-11

Citations