Publication:

Advanced metallization scheme for 3×50μm via middle TSV and beyond

Date

2015
Proceedings Paper
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Author(s)

Van Huylenbroeck, Stefaan  
;
Li, Yunlong  
;
Heylen, Nancy  
;
Croes, Kristof  
;
Beyer, Gerald  
;
Beyne, Eric  
;
Brouri, Mohand
;
Gopinath, Sanjay
;
Nalla, Praveen
;
Thorum, Matthew
;
Meshram, Prashant
;
Anjos, Daniela M.
;
Yu, Jengyi

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