Skip to content
Institutional repository
Communities & Collections
Browse all items
Scientific publications
Open knowledge
Log In
imec Publications
Conference contributions
Advanced metallization scheme for 3×50μm via middle TSV and beyond
Publication:
Advanced metallization scheme for 3×50μm via middle TSV and beyond
Copy permalink
Date
2015
Proceedings Paper
Simple item page
Full metadata
Statistics
Loading...
Loading...
Files
30609.pdf
1.28 MB
Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Van Huylenbroeck, Stefaan
;
Li, Yunlong
;
Heylen, Nancy
;
Croes, Kristof
;
Beyer, Gerald
;
Beyne, Eric
;
Brouri, Mohand
;
Gopinath, Sanjay
;
Nalla, Praveen
;
Thorum, Matthew
;
Meshram, Prashant
;
Anjos, Daniela M.
;
Yu, Jengyi
Journal
Abstract
Description
Metrics
Downloads
1
since deposited on 2021-10-23
Acq. date: 2025-12-09
Views
2007
since deposited on 2021-10-23
1
last month
Acq. date: 2025-12-09
Citations
Metrics
Downloads
1
since deposited on 2021-10-23
Acq. date: 2025-12-09
Views
2007
since deposited on 2021-10-23
1
last month
Acq. date: 2025-12-09
Citations