Browsing by author "Klippert, W."

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Dry development in an O2/SO2 plasma for sub-0.18 μm top layer imaging processes

Goethals, Mieke; Van Roey, Frieda; Sugihara, Takashi; Van den hove, Luc; Vertommen, Johan; Klippert, W. (1998)
Integrated silylation and dry development of resist for sub-0.15µm top surface imaging applications

Vertommen, Johan; Klippert, W.; Goethals, Mieke; Van Roey, Frieda (1998)