Dry development in an O2/SO2 plasma for sub-0.18 μm top layer imaging processes

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Authors

Goethals, Mieke; Van Roey, Frieda; Sugihara, Takashi; Van den hove, Luc; Vertommen, Johan; Klippert, W.

Issue

6

Journal

Journal of Vacuum Science and Technology B

Volume

12

Title

Dry development in an O2/SO2 plasma for sub-0.18 μm top layer imaging processes

Publication type

Journal article

Embargo date

9999-12-31

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