Browsing by author "Elwenspoek, M."
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Direct integration of micromachined pipettes in a flow channel for single DNA molecule study by optical tweezers
Rusu, Cristina; Van't Oever, R.; De Boer, M. J.; Jansen, Henri; Berenschot, J. W.; Bennink, M. L.; Kanger, J. S.; De Grooth, B. G.; Elwenspoek, M.; Greve, J.; Brugger, J.; Van Den Berg, A. (2001) -
The black silicon method. VIII. A study of the performance of etching silicon using Sf6/O-2-based chemistry with cryogenical wafer cooling and a high density ICP Source
Jansen, Henri; De Boer, M.; Wensink, H.; Kloeck, B.; Elwenspoek, M. (2001)