Authors

Jansen, Henri; De Boer, M.; Wensink, H.; Kloeck, B.; Elwenspoek, M.

Issue

9

Journal

Microelectronics Journal

Volume

32

Title

The black silicon method. VIII. A study of the performance of etching silicon using Sf6/O-2-based chemistry with cryogenical wafer cooling and a high density ICP Source

Publication type

Journal article