Browsing by author "Snijders, J.H.M."

Now showing items 1-2 of 2

Plasma-nitrided silicon-rich oxide as an extension to ultrathin nitrided oxide gate dielectrics

Cubaynes, F.N.; Venezia, V.C.; van der marel, C.; Snijders, J.H.M.; Everaert, Jean-Luc; Shi, Xiaoping; Rothschild, Aude; Schaekers, Marc (2005)
Properties of HfTaxOy high-k layers deposited by ALCVD

Zhao, Chao; Rittersma, Z.M.; van Berkum, J.G.M.; Snijders, J.H.M.; Hendriks, A.; Breimer, P.; Graat, P.; Maes, Jan; Witters, H.; Afanasiev, Valeri; Tois, E.; Tuominen, N.; Caymax, Matty; De Gendt, Stefan; Heyns, Marc (2005)