Publication:

Properties of HfTaxOy high-k layers deposited by ALCVD

Date

2005

Proceedings Paper

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Author(s)

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Rittersma, Z.M.

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van Berkum, J.G.M.

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Snijders, J.H.M.

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Afanasiev, Valeri

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De Gendt, Stefan

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Metrics

1972 since deposited on 2021-10-16

Acq. date: 2026-01-07