Properties of HfTaxOy high-k layers deposited by ALCVD

Simple item page Full metadata Statistics

Author(s)

;

Rittersma, Z.M.

;

van Berkum, J.G.M.

;

Snijders, J.H.M.

;

;

;

;

;

;

Afanasiev, Valeri

;

;

;

;

De Gendt, Stefan

;

Metrics

1972 since deposited on 2021-10-16

2last month

Acq. date: 2025-12-09