Browsing by author "Lismont, Mark"
Now showing items 1-4 of 4
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Evaluation of megasonic cleaning for sub-90-nm technologies
Vereecke, Guy; Holsteyns, Frank; Arnauts, Sophia; Beckx, Stephan; Jaenen, Patrick; Kenis, Karine; Lismont, Mark; Lux, Marcel; Vos, Rita; Snow, Jim; Mertens, Paul (2005) -
Issues for megasonic cleaning without damaging
Vereecke, Guy; Holsteyns, Frank; Arnauts, Sophia; Beckx, Stephan; Jaenen, Patrick; Kenis, Karine; Lismont, Mark; Lux, Marcel; Vos, Rita; Snow, Jim; Mertens, Paul (2005) -
Study of wetting of nanostructures using decoration by etching
Vereecke, Guy; Xu, XiuMei; Kesters, Els; Simms, Ishan; Nafus, Kathleen; Haensel, Leander; Kim, Tae-Gon; Lismont, Mark; Holsteyns, Frank; De Gendt, Stefan (2014) -
Temporary wafer bonding defect impact assessment on substrate thinning, process enhancement through systematic defect track down
Phommahaxay, Alain; Verbinnen, Greet; Suhard, Samuel; Bex, Pieter; Van den Eede, Axel; Pancken, Joris; Lismont, Mark; Jourdain, Anne; Woitke, Tobias; Bisson, Peter; Spiess, Walter; Swinnen, Bart; Beyer, Gerald; Miller, Andy; Beyne, Eric (2012)