Browsing by author "Vanderheyden, Rudi"
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Efficient cleaning of low-k materials using single-wafer cleaning solution: a compatibility study and electrical characterization
Le, Quoc Toan; Van Olmen, Jan; Vanderheyden, Rudi; Kesters, Els; Kenis, Karine; Conard, Thierry; Boullart, Werner; Baklanov, Mikhaïl; Vanhaelemeersch, Serge (2005)