Browsing by author "Gray, W.D."

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Comparative study of PECVD SiOCH low-k films obtained at different deposition conditions

Shamiryan, Denis; Weidner, K.; Gray, W.D.; Baklanov, Mikhaïl; Vanhaelemeersch, Serge; Maex, Karen (2002)
Process optimization and integration of trimethylsilane-deposited a-SiC:H and a-SiCO:H dielectric thin films for damascene processing

Gray, W.D.; Loboda, M.J.; Bremmer, J.N.; Struyf, Herbert; Lepage, Muriel; Van Hove, Marleen; Alves Donaton, Ricardo; Sleeckx, Erik; Stucchi, Michele; Lanckmans, Filip; Gao, Teng; Boullart, Werner; Coenegrachts, Bart; Maenhoudt, Mireille; Vanhaelemeersch, Serge; Meynen, H.; Maex, Karen (2003)