Browsing by author "Yamashita, Fumiko"
Now showing items 1-7 of 7
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A novel CBRAM integration using subtractive dry-etching process of Cu enabling high-performance memory scaling down to 10nm node
Redolfi, Augusto; Goux, Ludovic; Jossart, Nico; Yamashita, Fumiko; Nishimura, Eiichi; Urayama, Daisuke; Fujimoto, Kiwamu; Witters, Thomas; Lazzarino, Frederic; Jurczak, Gosia (2015) -
Demonstration of an N7 integrated fab process for metal oxide EUV photoresist
De Simone, Danilo; Mao, Ming; Kocsis, Michael; De Schepper, Peter; Lazzarino, Frederic; Vandenberghe, Geert; Yamashita, Fumiko; Stowers, Jason; Meyers, Steven; Grenville, Andrew; Luong, Vinh; Parnell, Doni; Clark, Benjamin L. (2016) -
Direct etched Cu characterization for advanced interconnects
Wen, Liang Gong; Yamashita, Fumiko; Tang, Baojun; Croes, Kristof; Tahara, Shigeru; Shimoda, Keiichi; Maeshiro, Takeru; Nishimura, Eiichi; Lazzarino, Frederic; Ciofi, Ivan; Boemmels, Juergen; Tokei, Zsolt (2015) -
Magnetic tunnel junctions etch and encapsulation process optimization for high-density STT-MRAM applications
Souriau, Laurent; Radisic, Dunja; Kundu, Shreya; Paraschiv, Vasile; Yamashita, Fumiko; Fujimoto, Kiwamu; Tahara, Shigeru; Maeda, K.; Kim, Woojin; Rao, Siddharth; Donadio, Gabriele Luca; Crotti, Davide; Tsvetanova, Diana; Swerts, Johan; Mertens, Sofie; Lin, Tsann; Couet, Sebastien; Piumi, Daniele; Kar, Gouri Sankar; Furnemont, Arnaud (2016) -
Pattern transfer challenges of the Sequential Infiltration Synthesis (SIS) of of Directed Self-Assembly (DSA) for line/space applications
Chan, BT; Singh, Arjun; Luong, Vinh; Parnell, Doni; Yamashita, Fumiko; Gronheid, Roel; de Marneffe, Jean-Francois; Piumi, Daniele (2016) -
Process window study of SAQP gratings used to pattern a dual damascene structure at 7nm technology node
Decoster, Stefan; Paolillo, Sara; Kesters, Els; Briggs, Basoene; van der Veen, Marleen; Lazzarino, Frederic; Piumi, Daniele; Yamashita, Fumiko; Demand, Marc; Kumar, Kaushik (2016) -
Short- and damage-free process for patterning magnetic tunnel junctions for high-density application
Radisic, Dunja; Souriau, Laurent; Paraschiv, Vasile; Goossens, Danny; Yamashita, Fumiko; Koizumi, Nao; Tahara, Shigeru; Nishimura, Eichi; Kim, Woojin; Donadio, Gabriele Luca; Crotti, Davide; Swerts, Johan; Mertens, Sofie; Lin, Tsann; Couet, Sebastien; Piumi, Daniele; Kar, Gouri Sankar; Furnemont, Arnaud (2015)