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Process window study of SAQP gratings used to pattern a dual damascene structure at 7nm technology node
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1979 since deposited on 2021-10-23
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Acq. date: 2025-10-25
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Views
1979 since deposited on 2021-10-23
429item.page.metrics.field.last-week
Acq. date: 2025-10-25
Citations