Publication:

Process window study of SAQP gratings used to pattern a dual damascene structure at 7nm technology node

Date

2016

Meeting abstract

Simple item page Full metadata Statistics

Files

34585.pdf 220.57 KB

Author(s)

Decoster, Stefan

;

;

;

Briggs, Basoene

;

van der Veen, Marleen

;

Lazzarino, Frederic

;

;

Yamashita, Fumiko

;

;

Statistics

1983 since deposited on 2021-10-23

Acq. date: 2026-09-10