Authors

Decoster, Stefan; Paolillo, Sara; Kesters, Els; Briggs, Basoene; van der Veen, Marleen; Lazzarino, Frederic; Piumi, Daniele; Yamashita, Fumiko; Demand, Marc; Kumar, Kaushik

Conference

Plasma Etch and Strip in Microtechnology - PESM

Title

Process window study of SAQP gratings used to pattern a dual damascene structure at 7nm technology node

Publication type

Meeting abstract

Embargo date

9999-12-31