Publication:

Process window study of SAQP gratings used to pattern a dual damascene structure at 7nm technology node

Date

2016
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Author(s)

Decoster, Stefan  
;
Paolillo, Sara  
;
Kesters, Els  
;
Briggs, Basoene  
;
van der Veen, Marleen  
;
Lazzarino, Frederic  
;
Piumi, Daniele  
;
Yamashita, Fumiko
;
Demand, Marc  
;
Kumar, Kaushik  

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