Browsing by author "Mecerreyes, David"

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LENS (Lithography Enhancement towards Nano Scale) a european project to support double exposure and double patterning technology development

Cantu, Pietro; Baldi, Livio; Piacentini, Paolo; Sytsma, Joost; Le Gratiet, Bernard; Gaugiran, Stephanie; Wong, Patrick; Miyashita, Hiroyuki; Atzei, Luisa Rita; Buch, Xavier; Verkleij, Dick; Toublan, Olivier; Perez-Murano, Francesco; Mecerreyes, David (2010)
LENS - Lithography enhancement towards nano scale

Cantu, Pietro; Baldi, Livio; De Simone, Danilo; Piacentini, Paolo; Fliervoet, Timon; Alberga, Gerold; Le Gratiet, Bertrand; Gaugiran, Stephanie; Wong, Patrick; Miyashita, Hiroyuki; Atzei, Luisa Rita; Buch, Xavier; Verkleiji, Dick; Toublan, Olivier; Perez Murano, Francesc; Mecerreyes, David (2010)