Publication:

LENS - Lithography enhancement towards nano scale

Date

2010
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22025.pdf 2.16 MB

Author(s)

Cantu, Pietro
;
Baldi, Livio
;
De Simone, Danilo  
;
Piacentini, Paolo
;
Fliervoet, Timon  
;
Alberga, Gerold
;
Le Gratiet, Bertrand
;
Gaugiran, Stephanie
;
Wong, Patrick  
;
Miyashita, Hiroyuki
;
Atzei, Luisa Rita
;
Buch, Xavier
;
Verkleiji, Dick
;
Toublan, Olivier
;
Perez Murano, Francesc
;
Mecerreyes, David

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2002 since deposited on 2021-10-18
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