Browsing by author "Shen, M."

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A systematic study of trade-offs in engineering a locally strained pMOSFET

Nouri, Faran; Verheyen, Peter; Washington, Lori; Moroz, Victor; De Wolf, Ingrid; Kawaguchi, S.; Biesemans, Serge; Schreutelkamp, Rob; Kim, Y.; Shen, M.; Xu, X.; Rooyackers, Rita; Jurczak, Gosia; Eneman, Geert; De Meyer, Kristin; Smith, L.; Pramanik, D.; Forstner, H.; Thirupapuliyur, S.; Higashi, G. (2004)
Characterization of etch residues generated on damascene structures

Le, Quoc Toan; Kesters, Els; Hoflijk, Ilse; Conard, Thierry; Shen, M.; Braun, S.; Burk, Y.; Holsteyns, Frank (2016)