Characterization of etch residues generated on damascene structures

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Authors
Le, Quoc Toan; Kesters, Els; Hoflijk, Ilse; Conard, Thierry; Shen, M.; Braun, S.; Burk, Y.; Holsteyns, Frank
Conference
Ultra Clean Processing of Semiconductor Surfaces XIII - UCPSS
Title
Characterization of etch residues generated on damascene structures
Publication type
Proceedings paper
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