Browsing by author "Diebold, A."

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Progress towards an electrically active, ultra-shallow junction depth reference for carrier illumination, SRP and SIMS

Borden, P.; Bechtler, L.; Klemme, B.; Nijmeijer, R.; Judge, E.; Diebold, A.; Bennett, J.; Vandervorst, Wilfried; Clarysse, Trudo; Caymax, Matty; Peytier, Ivan (2001)