Authors

Borden, P.; Bechtler, L.; Klemme, B.; Nijmeijer, R.; Judge, E.; Diebold, A.; Bennett, J.; Vandervorst, Wilfried; Clarysse, Trudo; Caymax, Matty; Peytier, Ivan

Conference

6th Int. Workshop on Fabrication, Characterization and Modeling of Ultra-Shallow Doping Profiles in Semiconductors - USJ

Title

Progress towards an electrically active, ultra-shallow junction depth reference for carrier illumination, SRP and SIMS

Publication type

Proceedings paper

Embargo date

9999-12-31