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Progress towards an electrically active, ultra-shallow junction depth reference for carrier illumination, SRP and SIMS
Publication:
Progress towards an electrically active, ultra-shallow junction depth reference for carrier illumination, SRP and SIMS
Date
2001
Proceedings Paper
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5073.pdf
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Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Borden, P.
;
Bechtler, L.
;
Klemme, B.
;
Nijmeijer, R.
;
Judge, E.
;
Diebold, A.
;
Bennett, J.
;
Vandervorst, Wilfried
;
Clarysse, Trudo
;
Caymax, Matty
;
Peytier, Ivan
Journal
Abstract
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1981
since deposited on 2021-10-14
Acq. date: 2025-10-23
Citations
Metrics
Views
1981
since deposited on 2021-10-14
Acq. date: 2025-10-23
Citations