Browsing by author "Okuno, Y."

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Ultra low-EOT (5 Å) gate-first and gate-last high performance CMOS achieved by gate-electrode optimization

Ragnarsson, Lars-Ake; Li, Zilan; Tseng, Joshua; Schram, Tom; Rohr, Erika; Cho, Moon Ju; Kauerauf, Thomas; Conard, Thierry; Okuno, Y.; Parvais, Bertrand; Absil, Philippe; Biesemans, Serge; Hoffmann, Thomas Y. (2009)