Publication:
Ultra low-EOT (5 Å) gate-first and gate-last high performance CMOS achieved by gate-electrode optimization
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2001 since deposited on 2021-10-18
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Acq. date: 2025-12-11
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2001 since deposited on 2021-10-18
2last month
2last week
Acq. date: 2025-12-11
Citations