Publication:

Ultra low-EOT (5 Å) gate-first and gate-last high performance CMOS achieved by gate-electrode optimization

Date

2009

Proceedings Paper

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Author(s)

Ragnarsson, Lars-Ake

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Kauerauf, Thomas

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Conard, Thierry

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Parvais, Bertrand

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Absil, Philippe

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Biesemans, Serge

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Hoffmann, Thomas Y.

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2013 since deposited on 2021-10-18

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Acq. date: 2026-04-25