Publication:
Ultra low-EOT (5 Å) gate-first and gate-last high performance CMOS achieved by gate-electrode optimization
Date
Loading...
Journal
Abstract
Description
Metrics
Views
1997 since deposited on 2021-10-18
Acq. date: 2025-10-23
Citations
Metrics
Views
1997 since deposited on 2021-10-18
Acq. date: 2025-10-23
Citations