Publication:
Ultra low-EOT (5 Å) gate-first and gate-last high performance CMOS achieved by gate-electrode optimization
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2016 since deposited on 2021-10-18
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Acq. date: 2026-09-12
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2016 since deposited on 2021-10-18
1last month
1last week
Acq. date: 2026-09-12
Citations