Browsing by author "Vankerckhoven, H."
Now showing items 1-4 of 4
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Can we increase the efficiency of organic contamination removal by ozone/Di-water processes by using additives?
De Smedt, Frank; Vankerckhoven, H.; De Gendt, Stefan; Heyns, Marc; Vinckier, Chris (2003) -
Determination of photoresist degradation products in O-3/DI processing
Vankerckhoven, H.; De Smedt, F.; Van Herp, B.; Claes, Martine; De Gendt, Stefan; Heyns, Marc; Vinckier, Chris (2002) -
Effect of additives on the removal efficiency of photoresist by ozone/Di-water processes; experimental study
Vankerckhoven, H.; De Smedt, Frank; Claes, Martine; De Gendt, Stefan; Heyns, Marc; Vinckier, Chris (2003) -
The increasing importance of the use of ozone in the microelectronics industry
De Smedt, F.; De Gendt, Stefan; Claes, Martine; Heyns, Marc; Vankerckhoven, H.; Vinckier, Chris (2002)