Authors

De Smedt, Frank; Vankerckhoven, H.; De Gendt, Stefan; Heyns, Marc; Vinckier, Chris

Conference

Ultra Clean Processing of Silicon Surfaces 2002 - UCPSS

Title

Can we increase the efficiency of organic contamination removal by ozone/Di-water processes by using additives?

Publication type

Proceedings paper

Embargo date

9999-12-31