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Can we increase the efficiency of organic contamination removal by ozone/Di-water processes by using additives?
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Can we increase the efficiency of organic contamination removal by ozone/Di-water processes by using additives?
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Date
2003
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
De Smedt, Frank
;
Vankerckhoven, H.
;
De Gendt, Stefan
;
Heyns, Marc
;
Vinckier, Chris
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1943
since deposited on 2021-10-15
2
last month
Acq. date: 2026-01-10
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Metrics
Views
1943
since deposited on 2021-10-15
2
last month
Acq. date: 2026-01-10
Citations