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Can we increase the efficiency of organic contamination removal by ozone/Di-water processes by using additives?

Date

2003
Proceedings Paper
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dc.contributor.authorDe Smedt, Frank
dc.contributor.authorVankerckhoven, H.
dc.contributor.authorDe Gendt, Stefan
dc.contributor.authorHeyns, Marc
dc.contributor.authorVinckier, Chris
dc.contributor.imecauthorDe Gendt, Stefan
dc.contributor.imecauthorHeyns, Marc
dc.contributor.orcidimecDe Gendt, Stefan::0000-0003-3775-3578
dc.date.accessioned2021-10-15T04:23:16Z
dc.date.available2021-10-15T04:23:16Z
dc.date.embargo9999-12-31
dc.date.issued2003
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/7446
dc.source.beginpage215
dc.source.conferenceUltra Clean Processing of Silicon Surfaces 2002 - UCPSS
dc.source.conferencedate16/09/2002
dc.source.conferencelocationOostende Belgium
dc.source.endpage219
dc.title

Can we increase the efficiency of organic contamination removal by ozone/Di-water processes by using additives?

dc.typeProceedings paper
dspace.entity.typePublication
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