Browsing by author "Chang, J.P."
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Interfacial properties of ZrO2 on silicon
Lin, Y.S.; Puthenkovilakam, R.; Chang, J.P.; Bouldin, C.; Levin, I.; Nguyen, N.V.; Ehrstein, J.; Sun, Y.; Pianetta, P.; Conard, Thierry; Vandervorst, Wilfried; Venturo, V.; Selbrede, S. (2003)