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Interfacial properties of ZrO2 on silicon
Publication:
Interfacial properties of ZrO2 on silicon
Date
2003
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Lin, Y.S.
;
Puthenkovilakam, R.
;
Chang, J.P.
;
Bouldin, C.
;
Levin, I.
;
Nguyen, N.V.
;
Ehrstein, J.
;
Sun, Y.
;
Pianetta, P.
;
Conard, Thierry
;
Vandervorst, Wilfried
;
Venturo, V.
;
Selbrede, S.
Journal
Journal of Applied Physics
Abstract
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1928
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Acq. date: 2025-10-24
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Metrics
Views
1928
since deposited on 2021-10-15
421
item.page.metrics.field.last-week
Acq. date: 2025-10-24
Citations